微纳通道谐振器检测与表征中的动力学问题

Dynamics problems of micro/nano channel resonators for detection and characterization

微纳通道机械谐振器在液体环境中具有超高的谐振频率、品质因子和灵敏度,常用于液体环境中的高精度检测与表征,在生物、医药、化工等领域有着广阔的应用前景.微纳通道机械谐振器的检测与表征功能高度依赖其动力学特性,而此类器件是由谐振结构、内部流体、被检测物和外部激励等多因素组成的耦合系统,涉及的动力学问题较为复杂,已成为谐振器件研究中的前沿热点和瓶颈问题.本文综述了微纳通道机械谐振器的研究进展,总结了谐振器件实现高精度检测与表征功能时的动力学设计原理,详细讨论了谐振器件的稳定性、频响特性、能量耗散、频率波动等动态特性,阐明了不同动力学问题的物理机制及其对谐振器性能的影响规律,可为深入厘清微纳通道机械谐振器的动力学设计问题,提高器件动态性能提供理论参考和技术支撑,对超高频、超高灵敏度谐振器的设计、制造及应用发展具有重要意义.

Micro/nano-channel mechanical resonators have ultra-high resonance frequency,quality factor,and sensitivity in liquid environment.Hence they are usually used for high-precision detection and characterization in liquid environments.These resonators have broad application prospects in the fields of biology,medicine,and chemical industry.The detection and characterization functions of micro/nano-channel mechanical are highly dependent on their dynamic characteristics.Such devices are coupled systems composed of multiple components,including resonant structure,internal fluid,detected object,external excitation and so on.As a result,the involved dynamic problems are much complicated,and they have become a hotspot and bottleneck in the research of resonant devices.In this paper,the research progress of micro/nano-channel mechanical resonators is reviewed.The dynamic design principles for high-precision detection and characterization are summarized.The dynamic characteristics,including stability,frequency response characteristics,energy dissipation,frequency fluctuations and so on,are discussed in detail.The physical mechanism of different dynamics and its influence on the performance of the resonator are expounded.It can provide theoretical reference and technical support for deep understanding of the dynamic design problem of micro/nano-channel mechanical resonators and improve the dynamic performance of the devices.And it is of great significance for the design,manufacture,and application of ultra-high frequency and ultra-high sensitivity devices.