不同离子束辅助沉积生物玻璃陶瓷膜的结构和溶解特性

Structure and Dissolution Properties of Bioglass Ceramics Films Deposited by Different Ion Beam Assistance

用能量 60keV、辅助注量为 2× 10 16 和 7× 10 15ions/cm2 的N+和Ar+离子束 ,分别将生物玻璃陶瓷 (BGC)辅助沉积于钛合金表面 .通过XRD ,FTIR ,XPS和EDAX对沉积膜进行表征发现 ,膜均呈非晶或无明显的结晶度 ,沉积膜中均出现C和O的污染 ,还引入了CO2 - 3 根基团 .N+离子束辅助沉积膜的Ca/P比低于BGC原材料 ,而Ar+离子束辅助沉积膜的Ca/P比高于BGC原材料 .在Hanks溶液中 ,N+离子辅助沉积膜的抗溶解特性略优于Ar+离子辅助沉积膜 ,二者均优于Ti合金 .

Two thin bioglass ceramics films on titanium alloy substrates were deposited using assistance methods of nitrogen ion beam with 60keV energy and 2×10 16 ions/cm 2 and argon ion beam with 60 keV energy and 7×10 15 ions/cm 2 , respectively. The as deposited films were characterized by XRD, FTIR, XPS and EDAX. These analyses revealed that two as deposited films were amorphous or no apparent crystallinity. Contamination from carbon and oxygen emerged in the deposition processes, leading to the presence of carbonate radical. Ca/P ratio of the film deposited by N + ion beamassistance is less to the ratio of the primary BGC, but that of the films deposited by Ar + ion beam assistance is high to that of primary BGC. The resistance to dissolve in Hanks solution for the film deposited by N + ion beam assistance is a little superior to that for the film deposited by Ar + ion beam assistance and is far superior to Ti alloy. The phenomenon observed in experiments was discussed .