干涉法测量器件表面特征缺陷的计算机模拟

The Computer Simulation of Testing Surface Defectby Optical Interference Method

光学干涉方法测量器件表面微小缺陷是一种有效的实验方法.对于多样性结果的唯一性分析,借助于计算机模拟,得到特征缺陷的干涉图样的模拟结果.该结果适用于不同波长,缺陷尺度连续变化的微小情况.使用误差跟踪计算办法,可分辨的缺陷尺度变化从1/2波长的10-1量级倍数到102量级倍数.

The computer simulation is shown useful for analyzing the interference code got by optical interference method in testing surface micro defect. And it is helpful for the analysis of the unique exact existence of the defect.The simulation is adapted to the various wave,and adapted to the minutely deformed of the defect.Calling the error tracing algorithm,the distinguishable size of defect varies from 10-1 grade to 102 grade multiple of half wavelength.