相对低温低压合成金刚石工艺的优越性

SUPERIORITY OF THE DIAMOND SYNTHESIS PROCESS AT RELATIVELY LOWER TEMPERATURE AND PRESSURE

相对低温低压理论在国内已提出并推广了十余年 ,由于有一系列优越性 ,已逐渐被人们所认可。为了帮助一些工作者更清楚的认识此问题 ,从设备、工艺、腔体、节能等四个方面予以总结。提出了实现相对低温压在金刚石合成的若干设计中采用“五小两大”的指导思想和相配合的一系列措施。

More than ten years passed since the relatively lower temperature and pressure theory has been proposed and promoted. It has gained recognition by the industry for its advantages. In order to make the things more clear for some workers,it is summarized four aspects including equipments, technologies, large chamber and energy saving. Some guidelines and relevant measures concerning about the designs of diamond synthesis at relatively lower temperature and pressure have been proposed.