温度对GaAs(100)晶面上金属有机化学气相沉积TiO2薄膜生长的影响
出处
《材料保护》
CAS
CSCD
北大核心
2003年第4期77-77,共1页
Materials Protection
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3赵立峰,谢长生.镍的金属有机化学气相沉积[J].材料导报,2002,16(4):52-54. 被引量:5
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10ZHANG JinCheng, LI ZhiMing, HAO Yue , WANG Hao & LI PeiXian Key Laboratory of Fundamental Science for National Defense on Wide Band-Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi’an 710071, China.Finite element analysis and optimization of temperature field in GaN-MOCVD reactor[J].Science China(Information Sciences),2010,53(10):2138-2143. 被引量:7