^(12)C重离子背散射方法及其对YBa_2Cu_3O_7超导膜界面元素扩散行为的研究

The ~12C RBS and the studies on diffusion behaviors at YBa_2Cu_3O_7/SrTiO_3 interface

将利用^(12)C作为轰击粒子的重离子背散射技术与利用α粒予作为轰击粒子的常规背散射技术相比较,讨论了质量分辨率、深度分辨率及分析灵敏度等方面重离子背散射所表现出来的优点,并且利用^(12)C重离子背散射方法分析了YBa_2Cu_3O_7/SrTiO_3界面处元素之间的扩散行为。

In this paper advantages and disadvantages of the 12C RBS over the conventional 4He RBS in mass resolution, depth resolution and detection sensitivities are discussed. The experimental results of the diffusion behavior of the YBa2Cu3O7/SrTi03 studied by using the 12C RBS are given.