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微光开关研究与发展现状

Review on the research and development of micro-optical switch
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摘要 光开关是光通信的关键部件 ,是近年来通信领域的研究热点 .文章介绍了微电子机械系统 ( MEMS)光开关的特点 ,从光开关的实现方式等方面分析了基于 MEMS的光开关的研究与生产现状 ,重点介绍了国外 MEMS光开关的研究与制作方法、应用水平 ,对发展我国的MEMS光开关提出了建议 . Optical switch is the key component in optical communications, it is the research focus in recent years. Properties of optical switches based on MEMS are introduced. Emphasized on research and fabrication of MEMS optical switch abroad,the state of the art of optical switch is reviewed in terms of implementation, driving mode, etc. Some suggestions on development optical switch in China are proposed at the end of this paper.
出处 《光通信研究》 北大核心 2003年第2期53-57,共5页 Study on Optical Communications
关键词 光开关 光通信 微电子机械系统 MEMS MEMS optical switch optical communication
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参考文献4

  • 1[1]Bjn Lfving, Sverker Hrd. Optical switching with two FLC SLMs [J]. Optics Communications,2000(174):81-90.
  • 2[2]Fu Yong-Qi, Ngoi Kok, Ann Bryan. Microfabrication of microlens array by focused ion beam technology[J]. Microelectronic Engineering,2000(54):211-221.
  • 3[3]Martin Hoffmann, Peter Kopka, Edgar Voges. Bistable micromechanical fiber-optic switches on silicon with thermal actuators [J]. Sensors and Actuators,1999(78):28-35.
  • 4[4]Mart B J, Diemeer. Polymeric thermo-optic space switchs for optical communications[J]. Optical Materials,1998(9):192-200.

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