激光抛光化学气相沉积金刚石膜

Laser polishing of chemically vapor-deposited diamond films

讨论了激光抛光金刚石膜机理、影响因素 ,分析了激光抛光金刚石膜理论模型、激光抛光后金刚石膜的粗糙度极限 ,提出要实现金刚石膜特别是厚膜的精密抛光须考虑激光辅助复合抛光或其它抛光工艺。

The principle and affecting factors of laser polishing of diamond films are disc ussed.The theoretical model of laser polishing of diamond films and surface roug hness of laser-polished diamond films are analysed.The composited polishing idea is proposed for fine polishing of diamond films,especially of thick fims.