电磁型平面微电机及其制作工艺

Electro-magnetic planar micromotor and its fabrication

为得到一种尺寸小、输出力矩大、转速高的直流可调速微电机,提出了一种利用微机械加工工艺制作微电机的方法。定子和转子都做成平面结构,定子线圈采用了平面型、无槽式集中绕组;线圈之间采用了三相星形连接方式,采用了微机械LIGA工艺和硅微机械加工工艺;转子采用钕铁硼永磁材料,进行轴向充磁,成辐射状间隔分布。装配时转子分布于定子两侧,不但减小了电机尺寸,还有利于定子的散热。把装配完毕的微电机接通三相半控控制电路对其转速和力矩进行了测试,测试结果表明,电机运转平稳,输出力矩大。

A kind of MEMS technology has been proposed for fabrication of micromotors, which are small in size, high in output torque and rotational speed, and speed controllable. The rotors and stators of the micromotor are all planar, the windings are made planar, grooveless and concentric using the LIGA technology and silicon micromachine technology. They are connected with three_phase stellated NdFeB permanent_magnet material and the rotor is magnetized axially.Two rotors are distributed at both sides of the stator, symmetrically. This kind of structure can not only reduce the axial dimension of the micromotor, but also reduce the convection of rotors and stators to the air. Finally, the assembled micromotor is run by three_phase square wave current. The results show that the micromotor has many advantages, such as stable speed and less ripple in the output torque.