摘要
主要讨论了采用掩膜方法制备的栅极型薄膜电感,报告这些薄膜电感的电感值和品质因数(Q值)在100 MHz～10 GHz范围的频谱特性。在此频率范围内,两种样品的电感值显示了平稳的频率特性,其数值分别为130 nH、155 nH;电阻在6 GHz以下也保持平稳,分别为31Ω、51Ω,在这个频率以上,由于高频趋肤效应而有一定的增大;Q值在1GHz～6GHz之间在20以上,并且在6GHz附近分别达到最大值160和110。
Using the masks, we prepared the grid-type thin film inductors. In this paper, we have discussed the frequency-dependence of their inductance and quality factor (Q-value) in a range of 100MHz-10GHz. The inductance shows flatness in this frequency range,and the values are 130nH and 155nH;the resistance are 31Ωand 51Ωkeeping stable under 6GHz. Due to the skin effect they are higher after this frequency; The quality value is over 20 from 1GHz to 6GHz and the highest value reaches 160 and 110 at about 6GHz.
出处
《苏州科技学院学报（自然科学版）》
CAS
2003年第1期37-42,共6页
Journal of Suzhou University of Science and Technology （Natural Science Edition）
