压阻式硅微加速度传感器的结构设计与仿真

Structure Design and Simulation of Piezoresistive Silicon Micro-accelerometer

一般的压阻式硅微加速度传感器结构多采用单梁加质量块的形式 ,这种形式的传感器灵敏度比较高 ,但它的横向效应较难克服 ,文中提出一种四梁结构的加速度传感器 ,通过仿真计算 。

Typically, the basic element of a piezoresistive silicon micro accelerometer is a mass spring system consisting of a single cantilever supporting a mass, this kind of accelerometer has the advantage of a high sensitivity, however, it has the disadvantage of a high cross sensitivity. This paper describes a four beam structure piezoresistive accelerometer; it is prove that the accelerometer has high properties through simulation and calculation.