激光数字平面检测系统的误差分析与应用

Research on Application of the System to Inspect Surface of Optical Plane with Laser Quantizing Technique

根据对实际光学平面玻璃表面误差检测结果的分析,深入地研究了激光数字平面检测系统中的理论误差与系统误差,提供了如何根据拟合干涉波面的Zernike多项式的系数对被测表面误差类型的判别方法,并对干涉条纹数量和拟合Zernike多项式阶的大小对精度的影响进行了研究。

Through the analysis of the error inspection results of actual optical plane glass surface, this paper makes a thorough study of the theoretical and systematical errors in the laser quantizing plane inspecting system, offers the methods of judging the error type of the inspected surface according to the coefficients of Zernike polynomials, and simultaneously the paper also discusses the effect of the number of interference stripe and the order of Zernike polynomials on precision of the system.