影响气相沉积用钽丝性能的因素研究

Study on Influence Factors on Property of Tantalum Wire for Vapor Deposition

以不同的冶金级钽粉为原料,通过相同的加工工艺试制成相同规格的钽丝,经过对钽丝产品机械性能、抗氧脆性、抗氢脆性以及表面质量的分析,确定气相沉积用钽丝一定要采用普通钽粉来制取,此外可以通过增大加工率来增加钽丝的抗拉强度。

Applying different metallurgical tantalum powder as raw materials,tantalum wires with the same specifications were prepared by same processing process.It is confirmed that tantalum wires for vapor deposition must be prepared by metallurgical tantalum powder based on the analysis results of mechanical properties,anti-oxygen brittleness,anti-hydrogen brittleness,and surface quality of tantalum wire products.Tensile strength of tantalum wire can be improved by increasing processing rate.