磁控溅射法制备PET基纳米TiO_2抗菌薄膜的研究

STUDY ON TiO_2 ANTIBACTERIAL FILMS ON PET SUBSTRATE PREPARED BY MAGNETRON SPUTTERING

利用磁控反应溅射法在PET基底上制备了纳米TiO2 抗菌薄膜。利用扫描电子显微镜(SEM)对制得的溅射膜的微观形貌进行了表征 ,发现采用磁控溅射法在很短的时间内即可在基底上得到一层致密均匀的由纳米粒子组成的薄膜。采用光 -氧抗菌实验方法 ,研究了溅射薄膜的抗菌性能。

In order to obtain TiO 2 films on PET substrate, magnetron sputtering method was introduced to prepare them. The morphology of the sputter-deposited films were observed by means of Scanning Electron Microscopy (SEM), and the properties of the films were investigated by a new antibacterial test. It was found that an uniform and tight TiO 2 nanoparticulate film can be deposited by this method in a short time, and the sputtered films have a good antibacterial performance obviously.