超晶格结构的X射线衍射拟合计算

X-RAY DOUBLE-CRYSTAL DIFFRACTION OF SUPERLATTICES AND ITS COMPUTER SIMULATION

运用X射线衍射运动学理论研究了[(Ga_(1-x)Al_xAs)_m(GaAs)_n ]_N/GaAs(001)-维超晶格的结构,通过模拟计算,精确确定了超晶格的结构参数.本方法可用于各种超晶格结构,具有普遍意义.另外,还对超晶格卫星峰强度的非称性和超晶格中叠层界面处存在过渡层的影响进行了讨论.

By using the X-ray diffraction kinematical theory which assumes ideally sharp interfaces, with computer simulation calculation, the accurate values of (GaAlAs)_m(GaAs)_n/GaAs(001) one-dimensional superlattice structure parameters have been obtained. In addition, the influence of asymmetry of the satellite peak intensity and the presence of the transition layer and the strain has also been analyzed and discussed.