SnO_2/Fe_2O_3双层薄膜的界面结构及其对气敏特性的影响

Interfacial Microstructures of SnO_2/Fe_2O_3 Bilayer andIts Influence on Gas-Sensitivity of SnO_2

本文给出用等离子化学气相沉积 (PCVD)技术制备的SnO2 /Fe2 O3 双层薄膜结构的俄歇谱 (AES)剖面分析、透射电镜 (TEM)断面形貌和扫描电镜 (SEM)表面形貌的实验研究结果。AES剖面分析和TEM断面形貌图显示在SnO2 与Fe2 O3 界面区有一个约 35nm厚的过渡层存在 ,其质地松散。实验还发现这个界面过渡层的存在缓解了层间应力 ,增强了SnO2 薄膜的附着力 ,对该双层膜的气敏特性有明显的控制作用 ;但当SnO2 层厚大于 2 70nm时 。

The SnQ2/Fe2O3 bilayer, grown by plasma chemical vapor deposition (PCVD), was studied with transmission electron microscopy (TEM), scanning electron microscopy (SEM) and Auger electron spectroscopy (AES). The AES depth profiles and TEM section analyses show that a soft transition layer, about 35 nm in thickness, exists at the interface of SnO2/Fe2Q3. We found that the interfacial transition layer favorably relaxes the stress, increases the adhesion of SnO2 on Fe2O3 and markedly controls the gas-sensitivity of the bilayer. However, hardly the influence the transition layer on gas-sensitivity can hardly be observed when SnO2 thickness exceeds 270 nm.