集成硅热流量传感器

Integrated Silicon Thermal Flow Sensor

将传感器与电路集成在同一个芯片上具有体积小、噪声小等优点 ,因而收到了广泛的重视。本文介绍了硅热流量传感器的基本原理及发展状况 ,并针对电路和传感器集成的过程中出现的问题进行了探讨 ,对该类传感器的设计有一定的参考价值。

Microsensors integrated with circuits in a chip have advantages of small dimension and low noises etc.The theory and development of silicon thermal flow sensors are introduced,and questions which appear when sensors are integrated with circuit are also discussed.It has some reference value for further design of this type of sensors.