钛酸钡薄膜的喷雾热分解方法制备及PTC效应研究

Preparation of BaTiO_3 Thin Films by Nebulized Spray Pyrolysis Method and Studies on PTC Effects

介绍了在Pt/Ti/Si( 1 0 0 )衬底上用溶胶溶液和喷雾热分解方法制备BaTiO3薄膜 ,并研究其PTC效应。富钛 3 %的钛酸钡溶胶溶液在衬底温度 65 0℃环境下成膜 ,氧气作为载气其流量为 1 5L/min ,80 0℃环境下退火 2h。在大于居里点温度Tc( 1 3 8℃ )时表现出良好的PTC效应。钛酸钡薄膜厚度 1 5 0 0nm时 ,室温下极间电阻为 70Ω。在大于居里点温度Tc( 1 3 8℃ )时 ,极间电阻可达 1 0 6 Ω。

Barium titanate thin films were prepared using sol solution by nebulized spray pyrolysis method on Pt/Ti/Si(100) substrate and PTC effect of the films were studied. Barium titanate sol solution, of which the titanium concentration was more than 3%mol, formed films at substrate temperature of 650 ℃. Pure oxygen was the carrier gas with a flow rate of 1 5 L/min. The films were annealed at 800 ℃ for 2 hours. Good PTC characters were shown above Curie point (T c,138 ℃). When the film thickness was 1 500 nm, the interelectrode resistance was only 70 Ω at ambient temperature, but reached 10 6Ω above Curie Point (T c,138 ℃).