采用显微拉曼光谱技术检测激光微加工质量

Quality Inspection of Laser Micro-processing with Using Micro-Raman Spectroscopy

本文简要介绍了准分子激光微加工的原理;分析比较了几种微检测技术的特点和用途;提出了采用显微拉曼光谱检测准分子激光微加工质量的新技术,并在有机玻璃和光刻胶制成的齿轮上分别进行了探索。研究结果表明:显微拉曼散射技术确实可以成为一种新的检测微加工质量的有效手段。

In paper, the principle of excimer laser microprocessing was introduced. Some kinds of technology for microinspection were analyzed and compared. A new technology for quality inspection of excimer laser microprocessing with using microRaman spectroscopy was proposed and tried on the micro gears of plexiglass and PMMA. The research results show that the microRaman scattering technology is really a new and effective method for quality inspection of microprocessing.