椭偏光谱测量匀质膜光学特性的计算分析

Spectral Ellipsometer Data Processing and Analyzing for Homosphere Film Measurement

应用椭偏光谱法,测量透明膜和吸收膜的折射率、厚度及消光系数。利用Delphi语言编程对实验数据进行处理,其结果与已正式出版的椭偏测厚数据表进行对比,各测量点绝对误差为0.01nm,该程序适用于椭偏光谱仪对各种匀质膜测量的数据处理。

The refractive index, thickness and extinction index of medium films were measured by spectral ellip-someter. The measured data were processed and analyzed by a program, which made by Delphi language. The data processed by the program was compared with the data table that has been published else where. The error of each metrical point was 0.01 nm. The program suits to data processing of homosphere films measured by spectral ellip-someter.