超精密加工伺服系统滑模控制技术研究

The Study on Sliding Mode Control Technique in Ultra - precision Manufacturing Servo System

为实现超精密加工伺服系统高精度跟踪控制,建立了交流永磁同步电机伺服系统模型,研究了带扰动观测器补偿的滑模变结构控制方法,仿真结果表明,该控制策略有效地抑制了负载扰动引起的抖振,对参数波动也有较强的适应能力,可以有效地提高系统的跟踪特性。

Fur the aim of realizing trace control with high accuracy in the ultra - precision manufacturing servo system, this paper gives AC permanent magnet synchronous motor servo system module, studies the method of variable - structure control system with sliding mode which has compensate by disturbance observation. Its simulation result shows this control strategy drawback vibration owe to load disturbance efficiently, has highly adaptive capacity to parameters variation and efficiently improve trace specification in the system.