摘要
采用电子回旋共振等离子体增强金属有机物化学气相沉积 (ECR -PEMOCVD)技术 ,在c轴取向的蓝宝石即α Al2 O3( 0 0 0 1)衬底上 ,以氮化镓 (GaN)缓冲层和外延层作为初始层 ,分别以高纯氮气 (N2 )和三甲基铝 (TMAl)为氮源和铝源低温生长氮化铝 (AlN)薄膜 .并利用反射高能电子衍射 (RHEED)、原子力显微镜 (AFM)和x射线衍射 (XRD)等测量结果 ,研究了氢等离子体清洗、氮化和GaN初始层对六方AlN外延层质量的影响 ,从而获得解理性与α Al2 O3衬底一致的六方相AlN单晶薄膜 ,其XRD半高宽为
The AlN film with GaN initial-layer ( GaN buffer layer and epilayer) has been grown on alpha-Al2O3 (0001) substrate by electron cyclotron resonance-plasma-enhanced metal organic chemical vapor deposition( ECR-PEMOCVD) technique at low temperatures using TMAl and high pure N-2 as Al and N sources, respectively. The effects of hydrogen plasma cleaning, nitridation and GaN inital-layer on the quality of AlN epilayer have been investigated by RHEED( reflection high-energy electron diffraction), TEM (transmission electron microscope) and XRD (x-ray diffraction). And high-quality hexagonal-phase AlN single crystal films whose cleavability is the same as the substrate have been grown at low temperatures. The full width at half maximum of XRD peaks is 12'.
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第5期1240-1244,共5页
Acta Physica Sinica
基金
国家自然科学基金 (批准号 :699760 0 8)资助的课题~~