摘要
本文介绍了由微型机控制的线宽标准测量系统。该系统用最大位移量为160μm、直线性小于1.5″的弹性铰链微动工作台作为x方向扫描驱动,压电晶体调焦。可工作在散射光照明或部分相干光照明条件下。测量不确定度小于±0.1μm。同时还研制了一套可供厂家使用的掩膜线宽标准样板。
In this paper, a microcomputer-controlled testing system of line-width standard in the range of 1 to 10 μm is described. A piezoelectric stage with a moving accuracy of 1.5 in the displacement of 160 μm. is used as an x-direc-tion scanning device. This system may operate with an illumination of scattering light or partial coherent light. The measuring uncertainty is less than ±0.1μm. A set of linewidth standard photomasks in the range of 1 to 10 μm is also developed.
出处
《计量学报》
CSCD
1989年第3期163-169,共7页
Acta Metrologica Sinica
