摘要
给出了Al-Cl-N-H体系的一组关联反应,探讨了化学气相淀积过程的关联反应热力学特性。根据Gibbs自由焓最小的原则,研究了Al-Cl-N-H体系的平衡组成。Al-Cl-N-H体系合成AlN超细粒子粉末的最佳温度为600～1200℃,AlN平衡得率和体系的初始组成有关,AlCl_2和AlCl的平衡得率随温度的升高而增大。
A group of relational reachions of Al-Cl-N-H system was given, and the thermodynamic properties were studied. Based on principle of the minimization of Gibbs free enegy, the equilibrium composition was calculated. It was found that the adaptive temperature range of chemical vapor deposition(CVD) AlN powder was 600～1200℃. The equilibrium yeild of ultrafine AlN particles depended on the initial composition. The contents of AlCl and AlCl_2 increased with increasing temperature.
基金
国家自然科学基金
关键词
氮化铝
化学气相淀积
aluminium ni tride
chemical vapor deposition
equilibrium composition
Gibbs free energy
thermal properties
optimization
ultrafine particles
