摘要
基于化学气相(CVD)合成超细粒子过程的反应、成核、生长和凝并,考虑CVD反应器中的轴向温度分布,建立了CVD反应器中描述超细粒子粒度及分布的一维过程模型。针对AlCl_3-NH_3-N_2体系化学气相合成AlN超细粒子的过程,研究了AlN粒子形成过程特征和操作参数对其粒度及分布的影响。CVD反应器中的轴向温度分布严重影响AlN粒子合成过程中的化学反应速率、成核速率和生长速率;AlN超细粒子的粒度随AlCl_3浓度的减小和总流量的增加而减小,其粒度分布宽度则随总流量的增加而增大。
Considering the axial temperature profile in CVD reactor, and based on the chemical reaction, nucleation, growth and coagulation of AlN UFP synthesis process by chemical vapor reaction, a one dimentional process model of particle size and distribution was established. To the AlCl_3-NH_3-N_2 system, the process properties of AlN particle formation and the effects of prosess parameters on AlN particle size and distribution were studied. The chemical reaction rate, nucleation rate and growth rate were strongly influenced by the axial temperature profile. The AlN particle size decrased with deceasing of AlCl_3 concentration and incrasing of total flow rate, and the AlN particle size distribution increased with increasing of total flow rate.
基金
国家自然科学基金资助项目
关键词
模型
合成
化学
气相淀积
氮化铝
modelling
synthesis process
particle size distribution
temperature distribution
chemical vapor deposition
aluminum nitride
ultrafine particles
