ICP-AES测定电镀高纯铜中微量磷

Determination of Micro Phosphorus in Electroplate Copper by ICP-AES

用浓 HNO3溶解高纯铜试样 ,电感耦合等离子体发射光谱 ( ICP- AES)测定其中微量磷 ,并对试样处理、测试方法、提高灵敏度等条件进行了优化实验。结果表明 ,方法回收率为 99.0 7%— 10 2 .0 % ,RSD( n=6)为 0 .2 2 %— 0 .2 5 %。

The micro amounts of phosphorus in electroplate copper dissolved with HNO 3 were determined by ICP-AES under the optimized experimental conditions.The recovery of this method is in the range of 99.07%-102.0%,and the RSD(n=6) is in the range of 0.22%-0.25%.