超灵敏度质谱检漏实验的新结果

New experimental results of an extra-high sensitive MSLD

为适应对真空及压力器件密封性日益增长的要求 ,尤其是确保小体积密封真空器件的长期可靠性 ,研制了一套超灵敏度检漏系统。这套全金属的超高真空系统主要由分子泵、离子泵、无油前级泵、消气剂泵和高性能的四极质谱计等组成 ,由于采用了现代先进的真空技术 ,仅在几个小时内就可达到 10 - 6 Pa的工作压强。该系统有两种检漏模式 ,累积模式用于漏率小于 5× 10 - 1 2 Pa· m3/s漏孔的检漏 ,更大的漏率则用动态检漏模式。实验结果表明该系统的最小可检漏率可达 1× 10 - 1 5Pa· m3/s。

To meet the increasing demands for ensuring the tightness reliability of vacuum or pressure devices, especially demands for ensuring the longterm reliability of sealed vacuum devices with small volume, an extra high sensitive MSLD is developed. This allmetal ultra high vacuum system, consisted of a turbomolecular pump, an ion pump, a dry roughing pump, a gettering pump and an UHV comparative Quadrupole Mass Spectrometer etc., makes the minimum working pressure reach 106  Pa in a few hours by using nowadays advanced vacuum technologies. In this system, accumulation mode is used to detect leak rates lower than 5×1012  Pa·m3/s, while dynamic mode is used for higher leak rate detection. New experimental results show that He leak rates as low as 1×1015  Pa·m3/s can be detected by this system.