柱光束反射式光电位移传感器的误差修正

Error Correction for Reflective Photoelectric Displacement Sensor with Columnar Light-Beam

本文从光电子学原理分析入手,讨论了柱光束反射式光电位移传感器的非线性输入-输出特性,提出用最佳一次多项式或三次多项式逼近传感器的输出曲线,并对两种逼近方法进行了误差实验和分析.

A reflective photoelectric displacement sensor with columnar light-beam for the measurement of strip edge position is described. The sensor consists of a light source, an optical system, a triple reflector, the silicon cell and some other electronic devices. Luminous flux variation reflected from the triple reflector due to the displacement of strip edge is detected by the sensor. The nonlinear input-output characteristic of the sensor is discussed on the basis of photoelectricity theory. Both the optimum first-order polynomial and third-order polynomial are proposed for fitting the output curve of the sensor. Error experiment and analysis have been made. The measuring range of the sensor is from -24 mm to 24 mm. The actual error is from -1.253 mm to 1.213 mm by first-order polynomial and -0.185 mm to 0.172mm by third-order polynomial.