摘要
本文论述了主要特种微细加工的原理、特点、现状及其应用。
In this paper, the principle, the characteristic, present state of chief special microfabrication and their applications are presented.
出处
《机电一体化》
2003年第3期6-9,共4页
Mechatronics
关键词
特种微细加工
电火花微细加工
离子束微细加工
激光微细加工
超声微细加工
special microfabrication electrical discharge micro - machining electron beam and ion beam micro - machining laser beam micro - machining atrasonic micro - machining
