多层膜结构磁光盘的设计与制备

Design and Preparation of Magneto-Optical Disk with Multilayer Film Structure

本文研究了多层夹心结构磁光盘的设计与制备工艺;利用以光学薄膜导纳特征矩阵为基础的优化计算技术,计算了限制反射率的四层夹心结构的磁光特性;使用射频溅射技术制备出“133mm PC基/AlN/TbFeCo/AlN/Al”高性能磁光盘.盘片的有效Kerr旋转角θ>1°,相应的反射率R>25%,品质因子F的实验值与优化计算值一致 .

The design and preparation technology for a magneto-optical disk with multi-layer sandwich structure are studied. The magneto-optical characteristic of quadri-layer sandwich structure for limiting the reflectivity has been calculated using the optimal calculation technique based on the admittance characteristic matrix of an optical film. A high performance disk with '133mm PC substrate/AIN/TbFeCo/AIN/AI' was prepared by the RF sputtering technique. The effective Kerr rotation angle was found to be larger than 1° with the corresponding reflectivity larger than 25%. The quality factor from experiment is shown to be in agreement with the calculated value.