多元注入硬质合金的X射线光电子能谱分析

X-ray Photoelectron Spectroscopy of Hard Alloy with Multi-ion Implantation

硬质合金以其优良的物理机械性能而广泛应用于工程领域,其性能不仅取决于组成各相的结构,也取决于其表面的状态.应用金属蒸汽真空弧离子源,对硬质合金进行了C、Cr、V多元离子注入处理,并进行了X射线光电子能谱检测,结果显示了各注入元素的存在状态以及与周围其他元素的结合状态,并由此进一步分析了对硬质合金性能的影响,对硬质合金实施了进一步表面改性,并提供了相关理论和实验支持.

Hard alloy is widely applied in the engineering field due to its excellent physical and mechanical properties. The service properties of hard alloy do not only depend on the structure of each ingredient, but also on surface state. By using Metal Vapor Vacuum Arc source, three elements of carbon(C),vanadium(V) and chromium(Cr) were implanted into the surface of hard alloy in several modes with different doses. Results of XPS show the existence state of each implanted element and the combination state with other elements, and further analyze the effect on the properties of hard alloy. The study offer theoretic and experimental support for the further surface modification of hard alloy.