近红外波段光子晶体的微细加工方法研究进展

Progress of microfabrication method of near infrared wavelength photonic crystals

光子晶体及其在光电子领域的应用是目前国际上的研究热点之一,是一种新型的光电子功能材料。在近红外光通讯领域中,光子晶体(对应光子晶体晶格常数为亚微米)有非常重要的应用,可以制作许多以前所不能制作的高性能光学器件。如何制备用于光通讯领域的光子晶体越来越引起广泛关注。本文综述了近红外波段光子晶体的微细加工制备方法的研究进展。

Photonic Crystals(PC) and its application in optoelectronics is one of the research focus recently.PC is a new kind of optoelectronics functional materials.PC which to be used in the 1.5 micrometer optical communications (the corresponding lattice constant is submicrometer) has much important application value and we could fabricate many high performance optic devices.How to fabricate PC which to be used in the 1.5 micrometer optical communications has attracted more and more interesting.This paper reviews the synthesis method of near infrared PC and its research progress. 