SOG技术及其新进展

SOG technology and its new progress

SOG材料与传统SOI材料一样,拥有许多优良的电学性能,例如SOG电路具有高开关速度、高密度、低压和低功耗等优点。同时由于SOG材料具有突出的光电性能,在太阳能电池和液晶显示器等光电设备中也有着广泛的应用,引起了人们越来越广泛的关注。本文综述了SOG材料的特点和应用,着重介绍了SOG材料的各种制备方法和新进展。

SOG material, as traditional SOI material, has much excellent electronics property, for example, SOG circuit has the advantage of high switch speed, high density, low voltage, low power and so on. Furthermore, SOG has extensive applications in photovoltaics devices such as solar cell and liquid crystal display for prominent photovoltaics property, and SOG has induced more and more attention. In this paper, the feature and the applications of SOG have been summarized. Primarily, various preparation methods and new progress have been introduced.