直拉单晶硅生长过程中固液界面形状研究

Study on the Shape between Solid-liquid Boundary Surface in Growth Process of Czochralski Monocrystalline Silicon

本文采用晶体生长软件CGSim对直拉单晶硅生长过程中固液界面进行了研究。讨论了不同晶体等径长度下固液界面形状的特点,模拟了晶体生长界面的变化过程;与此同时对不同晶体拉速、晶转、埚转对固液界面形状的影响进行研究,根据模拟结果确定影响固液界面的最优拉速、晶转及埚转。

The thesis adopts the CGSim software to study the solid-liquid interface in the course of pulling monocrystalline silicon growth.And then under the condition that crystals have the different length of diameter,it discusses the shape characteristics of solid-liquid interface and simulates crystal interface growth.At the same time,it discusses the influence of different crystal pulling speed,crystal and crucible rotation rates transfer on the shapes of solid-liquid interface.These simulation results help to determine crystal,the optimal speed,crystal rotation rate and crucible rotation rate that influence solid-liquid interfaces.