摘要
在氮直流辉光放电等离子体中采用快电子和离子(N+2,N+)混合的蒙特卡罗模型,模拟研究了e+N2→N+ N+N+2e e和N+2+N2→N++N+N2过程中粒子(N+,N)产生率的轴向分布随放电参数(工作气压、放电电压和温度)的变化规律。结果表明:两种离解过程中氮活性粒子(N+,N)的产生率都随气压和电压的增加而增大,随放电气体温度的升高而降低;但N+2-N2离解碰撞主要发生在阴极附近。电压较高时,阴极处的离子N+主要由N+2-N2离解过程产生;电压较低时,N+2-N2离解过程可忽略。中性原子N主要由电子碰撞离解过程产生。
Using Monte Carlo model with a combination of fast electron and ions (N+2,N+), creation rates of atomic species (N+,N) for both N+2-N2 and e-N2 dissociations under different discharge conditions in nitrogen glow discharges are investigated .It is found that creation rates of atomic species (N+,N) increase with increases in voltages or gas pressure ,but decrease with increases in gas temperature. N+2 ions are mainly produced in front of the cathode by N+2-N2 dissociation with higher voltages, and negligible with lower voltages. N atoms are mainly produced by e-N2 dissociation.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
2003年第2期113-118,共6页
Nuclear Fusion and Plasma Physics
基金
河北省教育厅资助项目(2002117)
河北师范大学资助项目(L2001Y04)
