摘要
α—M_2O_3(M=cr,Fe,Al)在硅衬底上的薄膜的红外透射光谱和基于晶体结构的理论红外光谱十分一致。因此,这些氧化物薄膜的红外光谱可用于有关薄膜的物相鉴定,特别是对薄膜中贴近硅衬底片那层氧化物的物相鉴定更为有效。本文对这些氧化物薄膜硅衬底的相互作用也进行了讨论。
The IR transmission spectra of thin films of α-Cr_2O_3, α-Fe_2O_3 on silicon substrate agree with theoretical prediction based on the crystal structure. An IR transmission spectrum can be used to characterizate the phase of thin films of corundum oxides, especially in the range near substrates. The interaction between oxide films and silicon substrates is discussed.
基金
This work is supported partly by Laboratory of Internal Friction and Defects in Solid, Academia Sinica, Hefei, P.R.China.
