表面处理对氮化硅陶瓷力学性能的影响

Effect of Grinding and Polishing on Residual Stress and Bending Strength of Silicon Nitride Ceramic

采用X射线衍射应力分析的sin2ψ法计算了Si3N4陶瓷试样的残余应力,并分别测量了表面处理前后Si3N4试样的力学性能。结果表明,经平面磨削后的Si3N4试样表面残余应力为拉应力,而抛光处理可适当降低残余应力。两种方法都使试样抗弯强度降低。

The residual stresses on the surface of the grinded and polished silicon nitride ceramics are measured using x-ray diffraction method.The effect of the residual stress on the bending strength is investigated.It is found that the residual stress introduced by grinding process is tensile and has a significant effect on reducing the bending strength.