CVD金刚石膜激光铲平切割工艺研究

The research on laser cutting technology of CVD diamond film

YAG金刚石激光铲平切割机是针对宁夏机械研究院生产的CVD金刚石膜进行后加工的设备.文章介绍了金刚石膜激光铲平切割机的工作原理、结构及其优越性.通过大量的CVD金刚石膜的切割试验,同时采用工具显微镜、扫描电子显微镜对切割后的CVD金刚石进行观察、比较,从大量的试验数据中总结出了影响金刚石膜切割质量的主要因素有激光输出功率、激光束焦点位置、切割速度及编程方法,并对其进行了深入阐述.研究结果表明,CVD金刚石膜切割的最佳工艺条件:激光输出功率为45W左右,激光束焦点处于CVD金刚石膜厚度的中心位置,切割速度在10～50mm/min之间,采用无指令加工方式并选择适当的加工路径.

YAG laser cutting machine of CVD diam ond film is used for finishing CVD dia mond film produced by the institute.This thesis has introduced working p rinciples,structures and advantan ges of the laser cutting machine;By a large number laser cutting tests,at the same time observing and comparing the cut CVD diamon d film using tool maker' s microscope and scanning electron microscope.It has arrived at a conclusion from many testing data that the primary factors that impair the qualities are laser output power,laser beam facus position,cutting speed and coded pr ogram methods.The research results have showed that the optimum technological conditions o f CVD diamond film laser cutting are:laser output power is about 45W,lase r beam focus po-sition is at the centre of CVD diamond film thickness,the cutting speed is between 10mm /min and 50mm /min and it' s better to adopt none command process method and select appropriate process path.