摘要
中心条纹不易分辨是宽光谱干涉仪应用的一大难点。提出的通道截取光谱法在对光程差进行测量时不需要分辨中心条纹,而且具有测量范围大,精度高,速度快等优点。从理论上对通道截取光谱法进行了分析,实验表明,采用通道截取光谱法可实现测量的范围2mm分辨率10nm。
The identification of the central fringe is a critical problem for the broadband source interferometer in practical application. A method which can avoid the identification for the channelled spectrum is presented and it has the advantages such as large range, high accuracy and quick. The theoretical and experimental analyses were given. Results are presented to demonstrate the performance of the method: the measurement resolution was estimated to be lO nm over a distance range of 2 mm.
出处
《光学技术》
EI
CAS
CSCD
2003年第3期290-291,294,共3页
Optical Technique
基金
863光电子主题(2001AA31222)
国家自然科学基金(60077023)
天津市自然科学基金(013601711)
教育部光电信息工程实验室访问学者基金
教育部光电信息工程实验室的支持和资助。