摘要
文中提出了一种白光干涉法测量薄膜表面微观不平度的方法。无需测量干涉条纹,通过对透明薄膜的反射光谱进行分析,可以测出薄膜的厚度。测试膜片上不同点的厚度,可以得到物体表面微观状貌。该方法测量精度高、对薄膜无破坏作用。薄膜厚度测量范围为0.2～小于20μm,无横向测试范围的限制。在对SiO_2薄膜的测试中,和椭圆偏振仪的测试结果相对照,纵向测量误差小于2nm。文中介绍的测试系统结构简单,测试精度高,测试结果可靠,具有较强的实用性。文章最后给出了对介质薄膜钛酸铅(PbTiO_3)表面的测试研究结果。
A method of detecting microcosmic uneven degree of film surface by reflected interference pattern of transparent film are discussed. Film thickness can be calculated, no need testing the interference stripe. Testing different points of the film, the surface roughness should get. This method is accurate and no-destructive. Thickness testing range is from 0.2nm to less than 20μm, transverse testing range has not limitation. In the testing of SiO2 film,thickness test error no more than 2nm compared with the results of ellipsometry. The testing system presented in the paper has great practicability for it' s simple structure,high testing precision and high reliability. In the measurement of Pb-TiO3 ,a kind of medium film, the testing results is given.
出处
《激光与红外》
CAS
CSCD
北大核心
2003年第2期150-152,共3页
Laser & Infrared
