氮离子注入金属表面的硬度研究

Study of Hardness on Metal Surface Implanted with N^+

用N^+注入金属表面,研究了显微硬度与注入剂量D的关系。实验表明,注入后材料的表面硬度值并不随D的增加而单调增加,存在一个剂量阈值D_(th),只有用该阈值的N^+注入,才能使材料表面硬度得到最大程度的提高。另外,表面显微硬度还是负荷的函数,随着负荷的增加逐渐趋于基体的硬度值。我们用TRIM算法计算了注入后N^+的浓度分布和注入层损伤分布,讨论了它们对材料表面性能的影响。

Several metals were implanted with N^+. The relation between microhardness and dose was investigated. It was found that the hardness doesn't increase monotonously with the dose D. There is a dose threshold Dth. The surface hardness values of material will reach maximum only if they were implanted with N^+ of threshold dose. Also, the microhardness value is a function of load. It tends to the hardness value of substrate gradually as the load added. In this paper, the distribution of concentration and damage were given by TRIM calculation and the effect of these distributions on material property was discussed also.