摘要
本文论述了一种精密光栅角位移测量系统,它体积小、重量轻、精度可达±1 5秒.并以此测量系统为例,介绍光栅角位移传感器的用途及测量原理,论述其结构设计及选型原则,并对光栅角位移传感器的误差进行了仔细分析.
In this article, the system of the precise sensor of grating angles is studied. It is small in volume, light in weight, and its precision can reach ±15s. The level of the product has reached advanced level in our country. This measure system includes the use and measure principle of sensor of grating angles, the design of structure and the principles of selective form, error analysis of sensor of grating angles.
出处
《中央民族大学学报（自然科学版）》
2003年第2期145-150,共6页
Journal of Minzu University of China(Natural Sciences Edition)
