摘要
通过对射频微机械共面波导(CPW)开关的工作原理进行分析,提出了一种测试射频微机械开关的电路结构。根据Cadence工作站的模拟,验证了该方案的可行性,并获得了该测试结构的优化电参数条件,为射频微机械CPW开关的测试和应用打下了基础。
A test method for radio frequency MEMS coplanar waveguide ( CPW) switch is presented based on the analysis of its operational principle Simulation indicates that this method is applicable for testing micromachined RF CPW switches Optimizing conditions for the test structure are obtained
出处
《微电子学》
CAS
CSCD
北大核心
2003年第1期12-14,18,共4页
Microelectronics