硅垫层材料的释气研究

Research on Gas Evolution of Silicon Cushion Materials

利用TG IR及GC MS与固相微萃取相结合的方法对三种不同结构的垫层材料的释气进行了研究。结果表明:在所有样品的气相富集物中均有H2O、CO2等无机组分及部分有机组分;在100℃富集的气相组分同200℃的实验结果类似,但200℃个别样品的有机组分增多。

Gas evolution of silicon cushion materials with different structure was investigated by using TGIR, GCMS and solid microextraction. The results showed that inorganic ingredients such as H2O,CO2 and partial organic ingredients were detected among the gas enrichment of all the samples. The gas enriching components at 100 ℃ had similar ingredients to that at 200 ℃,although organic ingredients in a few samples increased at 200 ℃.