二氧化硅薄膜材料热传导尺寸效应的实验研究

Experimental study of the thermal conduction size effect for silicon dioxide film

对微米SiO2薄膜材料沿膜面方向热传导尺寸效应进行了实验研究。结果表明,膜厚从微米数量级的尺寸开始,其传热的热导率就已开始体现出鲜明的膜厚尺寸依赖特性(即sizeeffect),经由微观能量输运理论分析后,得到了实验与理论相吻合的结果。

The thermal conduction size effect along surface layer of micrometer SiO2 film is studied.The result indicates that the thermal conductivity of the film from the beginning of micrometer scale size shows clear size effect.The experiment result is as well as the analysis result by analyzing microscopic energy transport.