三平板剪切干涉仪自动测试系统

Triangular shearing interferometer automatic test system

三平板剪切干涉仪是环路剪切干涉仪中最简单的一种 ,它具有基本等光程、剪切量连续可调、两出射光束恒相互平行等特点。利用三平板剪切干涉仪对激光器出射波面质量进行检测 ,探讨了由剪切干涉图复原原始波面的 1阶微分法 ,编制了专家辅助软件系统 ,为光机型的三平板剪切干涉仪配置了实时图像采集、处理系统 ,实现了光、机、电、算相结合 ,融硬、软件于一体的数字波面剪切干涉仪 ,并通过实验验证了方法的重复性精度。

The triangular shearing interferometer,one of the most simple shearing interferometer,which has almost equal light distance,continuously adjustable shearing quality and two everlastingly parallel launching light beams,is described in the paper.Based on the interferometer,the quality of the laser wave front was detected.Then one-step differential method to recover the original wave front from the shearing interference pattern was discussed.Professional auxiliary system was applied to image processing,so the interferometer was combined with optics,mechanics and electronics.Finally the repetitive precision was experimentally checked up.