8Dong Yan, Amit Lal. Design and characterization of slit variable microgratings[J]. IEEE Sensors Jounal, 2006, 6(2): 458-464.
9R. Lockhart, M. Tormen, P. Niedermann et al.. High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers[J]. IEEE/LEOS Internat. Conf. on Optical MEMS and Nanophotonics, 2008. 33-34.
10Cornel Marxer, Christian Thio, Marc-Alexia Gretillat et al.. Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications[J]. J. Microelectromechanical Systems, 1997, 6(3): 277-285.
