智能剥离技术制备单晶SOG材料的研究

Fabrication of monocrystalline silicon on glass by smart-cut

结合中等剂量的氢离子注入和阳极键合(Anodicbonding),利用智能剥离技术(Smart-cut)成功转移了一层单晶硅到玻璃衬底上。采用剖面透射电镜、高分辨透射电镜、扫描电镜和拉曼光谱等对SOG材料进行了研究,结果表明此技术制备的SOG材料具有界面陡峭、平整,顶层硅单晶质量完好等优点。

Monocrystalline Silicon films were transferred to a glass substrate by Smart-cut technique which based on H+ions implantation, anodic bonding and layer splitting. The SOG structures were characterized by cross-section transmission electron microscopy (XTEM), HRTEM,Scanning electron microscopy (SEM) and Raman Spectroscopy. The results show that SOG materials fabricated by Smart- cut has advantages of steep top Si/glass interface and good monocrystalline Si quality.