摘要
优化工艺参数是保证双光子微细加工质量的重要条件。经分析选取了激发光强、覆盖率和物镜的数值孔径作为实验研究对象。用自行开发的双光子微细加工系统,通过单独控制一个加工条件而固定其它条件的方法,对比不同条件下系统的实验结果,探讨该工艺条件对加工质量的影响。最后,给出了经参数优化后的部分实验结果。
Optimization of process parameters is an important condition of twophoton microfabrication. After analyzed,the exciting laser intensity,the coverage rate and the numerical aperture of objectives are selected for experimental research. Using the twophoton microfabrication system we built, the experimental resuts under the different conditions varing one process parameter while fixing the other process parameters are compared and the effect of the parameter on the processing quality is discussed. Some experimental results after the optimization of the process parameters are given.
出处
《微细加工技术》
2003年第2期59-63,共5页
Microfabrication Technology
基金
国家自然科学基金资助项目(50275140)
关键词
双光子三维微细加工
工艺参数
激发光强
覆盖率
物镜数值孔径
two-photon microfabrication
exciting laser intensity
coverage rate
numerical aperture of objective
