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^(40)Ar^(10+)轰击Al和Si固体表面形成的200~1000nm光谱 被引量:3

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摘要 报道了利用兰州重离子加速器国家实验室ECR离子源提供的高电荷态离子^(40)Ar^(10+)入射到Al和p型Si表面所产生的Al,Si,Ar原子的200~1000nm特征光谱的实验测量结果。结果表明,低速高电荷态离子与团体表面原子相互作用可有效地激发靶原子和靶离子的特征谱线,而且由于发射二次电子的无辐射退激与辐射光子退激过程的竞争,使得在p型Si表面上Ar原子的光谱强度总体大于在Al表面上的光谱强度。
出处 《中国科学(G辑)》 CSCD 2003年第3期234-239,共6页
基金 国家自然科学基金(批准号:10134010) 国家自然科学基金(批准号:19804012 10274058 10274088)
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